716-026652-911 是泛林集团（Lam Research）半导体刻蚀设备专用的底部边缘环（Ring Edge Bot），适用于 200-300mm 晶圆制程。
作为您产线维护的“搭子”，我深知这个备件对于维持刻蚀机台（如 Kiyo 或 Versys 系列）工艺稳定性的关键作用。这类石英或陶瓷材质的边缘环直接暴露在等离子体环境中，负责保护腔室壁并优化晶圆边缘的刻蚀均匀性，一旦磨损或污染，极易导致颗粒污染或刻蚀速率不均。结合您之前对 TEL 和 Lam 其他型号（如 716-017112-330、716-077262-111）的关注，这款 716-026652-911 同样属于高频消耗的核心精密备件，市场上既有全新原装（New Surplus）也有经过严格清洗翻新的流通品，采购时需特别留意其表面状态和质保期限。
Gefran Maag Pump Systems ME1-6-M-P03M-1-4-D-216 Melt Pressure T -
Rockwell Automation 1000-PF36R1K20-NC-W-TA Resistor 1200W -
Turck SE-84X4-E924 9-Port Industrial Ethernet Switch 10/100 Mbp -
GE GPS1BHAG MANUAL MOTOR STARTER
Ace Controls MC4525-4 Z1913 Shock Absorber -
KEYENCE EM030P SWITCH
Asco 8210G002 120VAC 1/2" NPT 2/2 Normally Closed Solenoid Valve 20043
Allen Bradley - 100-C165EJ10 /B Contactor 3P AUX CON -
MIKI Pulley SFS-06S-12M-11C Flexible Coupling Assembly -
PARKER RG2HTSU351 CYLINDER
FESTO 159174 FILTER
STARK MANUFACTURING 5414634
Wago 757-285/000-010 M12 Sensor/Actuator Box 8-Way 5P 10M Connecting Cable - ...
DMIC BVAH1500SM Ball Valve 1.5" 3000psi Non-Threaded -
THOMAS & BETTS 1222GIBBU1 INSULATED BUSHINGS
Tool-Flo FLG-3062R M6 Carbide Inserts (10 pcs) -
DAYKIN TF501E TRANSFORMER
GE FANUC 53IXI37TRGACGI RELAY CARD -
NORGREN EC90G-2-0-0-0-0-0-0-D-30-0 CLAMP
Fanuc A16B-3200-0040 Main CPU Board - RECONDITIONED
Hilti TE-YD Hollow Hammer Drill Bit 24" x 1-1/8" 2018965 -
Sealant Equipment 2200-245-099-AA Tip Seal Dispense Valve -
Castrol LubeCon 16977 Advanced System Controller 4 Program Chan -
Phoenix Contact Socket Chassis 1604728 and Connectors Component 5604801- ...
Mean Well SDR-480-24 AC to DC Power Supply 24V 480W -
Tucker B 266P E 100 916A Stud Welder Control Board
Tucker B 266A E 100 916A Stud Welder Control Board
Tucker B310-VC E 110 307 Stud Welder Control Board tmp 1500 KMG
EMC RB2T-190/060 Fan 400/460V 50/60Hz 2450-2750 RPM
NELSON WELD LP A I/O 66-02-11 BOARD
GLEASON 31718334
CIRCLE MACHINE JSMI1000123R BORING BAR
Grove Gear Gold SP BMQ215-3 1.02HP 56CMF 10 Ratio Gearbox Reduc -
PHD NPGMF1118X3
ISSC 90RR3A MODULE
TPC Wire & Cable 51925 Super-Trex Rubber Flex Relief Boot -
SMC C96ST63-50 TIE ROD CYLINDER
Siemens 6ES5465-4UA13 SIMATIC S5 Analog Input Module 465 -
BALLUFF BES-516-200-S2/4.990-S5 Inductive Proximity Sensor -
Joslyn Clark 7000-7140-11 Definite Purpose Contactor -
Siemens 500-633917 CAB-BATT Battery Box Enclosure - Factory Sealed
Eaton Bussmann GMD-2-R Glass Fuse Gmd Series (50 PCS) 2A 250V A - Factory Sealed
LEEDS & NORTHRUP 4.97E+13 CELL SENSOR
HYSON TNKB100088 SPRING
CHAMBER SC-1 FLUID INDUCTION CHAMBER -
OGDEN CBE05J05A HEATER
Turck RKC 4.4T-1.5-WSC 4.4T/S622 U5214 Cable - Factory Sealed
Thomas & Betts 58371 3/4" Galvanized Steel Utility Box (50 PCS) - Factory Sealed
TARGET ROCK 1006173
Warren Emhart E110330 Board -
Bimba CYL-1952035 Pneumatic Cylinder 1.5" Bore x 10.63" Stroke 250 PSI MAX
ARO ANAQKABBAB084 CYLINDER
NUMATICS 92242U REGULATOR VALVE
DGD NT10 BOARD
Square D 9012GNG1 Pressure Switch 2-10 PSIG.
Bosch 081WV06P1V1012 Directional Solenoid Valve 250 BAR WC024/00 E51
STATESVILLE PROCESS INSTRUMENTS HR62178B 240V 10000W Heater R -
BRETCO 730028 POWER SUPPLY
CONTINENTAL HYDRAULICS P03MSVPDRP300AAB
SMC Pneumatic Cylinder C96SL32320
Euchner TZ1RE024BHA-C1903 Safety Gate Switch 082096 -
PRECISION TWIST DRILL 020122
DAIDEN E91337
WESTINGHOUSE KA241 VOLT METER
FANUC EE4657620002
MORFLEX 30488 COUPLING
Numatics F900H-16ADG Coalescing Filter Delta Series 250 PSI -
Universal Flow Monitors 05GM-4-450V.9-A3WR Flow Rate Indicator -
F.P.M. 211133BA VALVE
TRANSFORMER 256100033001B
ARPAC CORP. 2000B TEMPERATURE CONTROL
VEEDER ROOT 743525005 COUNTER
Banner MDSINT-1T2 Dual MINI-SCREEN Controller 24V DIN -
Watlow BLN79G5-21 Heater Element 480V 3000W 3PH 14" Long -
Omron E2CA-AL4C Proximity Sensor Amplifier 12-24 VDC 4-20 mA -
MULTIFASTENER PSM16300TRSK3 SEAL KIT
Donaldson Dryflo Cartridge Filter P191016-016-340 DMC-MMB
Parker D1VW004CNTGF56 Control Valve 1500PSI
Vektor 41-421-21 Hydraulic Work Clamp -
Banner PVA225P6EQ Light Curtain Emitter -
TURCK BIMA23AZ3XB1131S34 Proximity Sensor -
Numatrol LR3-0201 3-Way Limit Valve Lever Operated 150psig (QTY!).Condition:Fact
GEMS 30288 LS-2050 Series Side Mount Float Switch Brass Buna-N SPDT 120/240VA...
Turck FDNL-CSG88-T Bus Stop 8 Port I/O Module DeviceNet
Honeywell HVS270-143-CS1 VISITRONIC Multiframe Micro Switch Sensor Camera 8ms...
DE-STA-CO 82M8D50C83NA CLAMP
PEPPERL & FUCHS VAZ-LED-70MM-GN STACK LIGHT
MCDONNELL 1INCHFLOWSWITCH
CUTLER HAMMER 10316H828 LIMIT SWITCH
Allen Bradley 800HJP19KE7AAXX 3 Position Type 7&9 Selector Switch -
SMC MHL2-20D Air Parallel Gripper 20mm Stroke -
MAC 6513B-000-PM-592DA Pneumatic Solenoid Valve 4-Way -
Asea 2668 180-40 /1 PCB Buss Termination Module -
Noshok 615-100-1-1-2-25 Pressure Transmitter 100psi 10-30VDC -
Analog Devices 3B17CUSTOM LVDT Input 5V RMS 8.4KHZ Exc -
INLAND MOTORS TT82950 MOTOR
SNAPTITE PAV40T3P15ARCP
Pacific Scientific S34GNNA-HGNE-00 Bless 3.8A -
TB Wood's WE5H1 Dura-Flex Tire Coupling Hub Bore 1" -
Allen Bradley 2711P-RAK6 /A Cutout Adapter Kit -
Euchner NZ2HB-3131(090137) Safety Switch 15-50VAC 4A 3-24VDC 4A IP65 - In...
PARKER HANNIFIN 190408503 CYLINDER
9.14-14.00A Full Load (Box of 3).Condition:Ne
Numatics ZSE1-00-55 Compact Pneumatic Pressure Switch 12-24 VDC.Condition: In
Turck RS 4.5T-26-RS 4.5T/S653 QD Cable Cordset 26M Length UX00982 -
Numatics VT32N06Y Pneumatic Lockout Valve w/ Slo-Start 3/4" NPT.Condition: In
Gates MGT-1600-62 GT Carbon Poly Chain Timing Belt -
MICRON 363027610341 TRANSDUCER
General Electric 3175402 Solenoid Coil 440 VAC -
TJ SNOW 1200 JUMPER
HYSON T2SK7500 SEAL KIT
Allen Bradley 8000-AGW Encoder Servo Module w/ Wide Maker M605 - Reconditioned!
Ace Controls MC4525M42157 Industrial Shock Absorber 217-9021 -
Allen Bradley 800P-F2CGA Palm Operated Pushbutton -
Phoenix Contact PSR-MC32-3NO-1NC-24-230UC-SC Emergency Stop/Saf -
Allen Bradley 1746-NI8 SLC 500 PLC Analog Input Module - Reconditioned
Copperfield TXL18-8 Wire -
SECO SD5008751751000R
Festo VZ-3-PK-3 Time Delay Flow Control Valve 2.5-8 Bar - Factory Sealed
HUBBELL 074-01-028 11/4" Liquid Tight Cord Connector with Strai -
SMC ECQ2L63-100DM Compact Cylinder -
Carlo Gavazzi RGC1A60D62KGU Contactor 1-Pole SSR 660V 65A -
Condor HE5-8-0V-A + Regulated Linear Power Supply HE5-18-OV-A+ - Reconditioned
PRECISION TWIST DRILL 020106
Rexroth ZDBK 10 VP2-11/210/V Relief Valve Actuator R900564530 -
Endress+Hauser PMP55-FA21JD1PGJU5JA1A+AAZ1 Absolute Pressure Tr -
Automation Direct STP-MTRH-34127+112339001709 Stepper Motor 6.3 -
MILCO CHD-491-2.0 CYLINDER ASSEMBLY
EFD ABHB 30.67A BOARD
BIMBA MP2112X4HC CYLINDER
Allen Bradley 836T-T251JX9 Pressure Switch 140-1000 PSI Adj -
BOSCH 5761510220
Y2K RB1004
KEYENCE LV-21 AP SO (2372) LASER SENSOR AMPLIFIER
Parker 32 CCPHMIYLS19MC 85.00 Hydraulic Cylinder -
Allen Bradley 1771-AB 8-Slot I/O Chassis Ser. A -
INTERAUTOMATION 33271 DRIVER
QUALTECH 2520L UTILITY TRAY
FESTO MUHX2-ZP-D-1-24G VALVE
Pepperl & Fuchs 71938 Zener Barrier
Winters PLP301 Low Pressure Gauge -
Dwyer 3040 HH HP TP Photohelic Pressure Switch / Gage Series 3000 -
PARKER P2LBL592VV LEVER
PARKER 6AC6L5BNSS VALVE
Honeywell 71335SN1GNJ1M2J011C2 Skinner Valve -
UNIVERSAL FLOW MONITORS PX20GPM8FF MONITOR
TRANSFORMER 924102010
REXROTH 3WE6A60EW110N9K4
HOFFMAN ISN80545
Allen Bradley 1775-KA Communication Adaptor
BARRETT ELECTRONICS DF65019249 Board Reconditioned
SMC VSS810FHGD3EZV1 VALVE
Parker N1620S Colorflow In-Line Needle Valve 3000 Psi 207 Bar M
Endress+Hauser FTL51-4AH84/0 Liquiphant M Vibrating Level Switc -
CONTEMPORARY CONTROLS PC10420-TPB ARCNET NETWORK INTERFACE MODULE
FUJINON HF50HA-1B TV Lens -
Fortress Interlocks ITM-00202736 Machine Guarding tGard Access -
MSA Regulator 711175 Model RP Combination 0.25LPM
Atlanta 58-43-239 Servo-Drive System Gear Reducer
Perceptron 912-0017 Tricam Surface Sensor S1000-X0046-Y0062-Z0126 - !
Tucker E 110 707 B 407 Servo Control Board -
3M 1B Series Filter Housing 1B1 4029211 3/4" NPT 250PSI Cast Ir -
Dungs 230472 Pressure Regulator FRI 705/6 7 PSI -
Automation Direct PSUR-0P-1F Photoelectric Sensor 10-30VDC -
Turck TN-CK40-H1147 Inductive Proximity Switch -
Smith Blair 22600035012000 Stainless Steel Clamp -
Balluff BKS-S 32M-25 Single Ended Cordset 60VAC/DC 8-PIN 25M B -
Fanuc A20B-8100-0450 /06B Auxiliary Ethernet Circuit Board A20B -
Lithonia Lighting IBG-18000LM-SEF-AFL-GND-480 I-Beam IBG LED Hi -
Graco 208855 Stainless Steel Fluid Gauge w/ Dampener 0-300psi -
IFM Efector OG5068 Through-beam Sensor Receiver -
MILLER IPA84B2B807525N220 PNEUMATIC ROTATE
Allen Bradley 140M-F8N-C32 Motor Protector Circuit Breaker SerC -
Allen Bradley 2090-UXNPBMP-10S15-A Motor Power Cable
PARKER HANNIFIN 690708503 KIT
Piab 9901668 Vacuum Generator Unit VGS3040 Series
LN CIRCUIT BOARDS 445932 **REP**
Festo 163306 Pneumatic Cylinder -
NUMATICS I35BA415M000030
Mahlo 09045-0256-05-1 Box PC Art. Nr. 73-010052
SMC XT13491N04 REGULATOR
KEYENCE CZK1 SENSOR AMPLIFIER
PHD ML216682 CYLINDER
GENERAL W18271042 CONTACT
Siemens 201-01000 Power Supply Board -
GORE 0030H SEALANT
PORT I0000TC CONNECTOR
GENERAL VJ1ROBOT CABLE
Fanuc EE-3287-132-135 Cable -
Lithonia RELOC OC 277 12/4G M10 OnePas Converter (10 PCS) 71827 - Factory Sealed
MODULE, ALLEN BRADLEY - 1769-IQ16, SERIES A, COMPACT I/O.Condition:
IFM SI8518 Flow Monitor Kit SI0508 w/E40107 Adapterr -
Banner SI-LS42DMJ Safety Interlock Switch Solenoid Locking 4788 -
Intercon CP21-OWPB-0140-AA POwer Cable -
Fanuc A20B-2901-0941/02A PC Board Dram Module
Norgren 157994/210 Power Clamp -
PHD SGD24X212DBGY CYLINDER
PARKER P41000004000-00400 Rodless Cylinder -
Parker P1D4G032MC-0330N1NNN Cylinder -
SMC C95SDB32-XC11-DUO03482 Pneumatic Cylinder -
PARKER 934635 TYPE E SERIES INDICATOR
BALLUFF BIS C-310 READ/WRITE HEAD SENSOR
Nachi FAN1-40B50-9664Hydraulic Cylinder F-8619 08.5 MPA -
Allen Bradley 802T-AMPR5 Limit Switch -
BTM PG38-MLG-SF-FM-1-4-TSPP-DC-L Clamp C97193 -
port Q2020-RDC1 Temperature Panel Meter -
PARKER HANNIFIN KCP2HLT141C CYLINDER
John Crane P250008 Mechanical Seal TM SD D55 EURODIN 502/BP GR1 -
APPLIED ROBOTICS 0511-P53N ADAPTER, EQUIPMENT PART -
CUTLER HAMMER E51DED SENSOR
Acuity Autobahn LED Lamp Cobra Head ATB0 20BLEDE10MVOLT R3 NL -
SPEEDAIRE 4ZK94
Brad Harrison BTB400P-FBW-10 Passive Junction Box 4 Ports LED T -
FIDIA AATB12 BOARD
MILLER IPA-89B2B-0080-60.000-0025-N22N-0 AIR PNEUMATIC CYLINDER
SIEMENS Control Block Board 6SN11180DM210AA0
SMC NCDA1B200-3000-X142US Medium Duty Air Cylinder -
Norgren P74F-6AD-NNN Poppet Valve 150psig 24VDC 5/8" NPT -
SMC CXSL32-25 Dual Rod Cylinder 32mm Bore 25mm Stroke -
Eaton Char-Lynn 9900100-000 Hydraulic Pump Rebuild Kit S Series -
